Soft-Nanoimprint Lithography with linear and nonlinear Nanoparticles

Soft-nanoimprint lithography is combined with solution processing to obtain linear and nonlinear photonic structures as 2D and 3D photonic crystals and metasurfaces. The versatile and low-cost bottum-up fabrication technique is a promising technique to enable large-scale (cm² or even larger) nanophotonic devices. We are mainly using TiO₂ and BaTiO₃, but we are in principle not limited to the kind of material.